NPRE 423

Engineering at Illinois Engineering at Illinois

Nuclear, Plasma, and Radiological Engineering

NPRE 423

COURSE OUTLINE

Course Number: NPRE 429

Title: Plasma Engineering

Catalogue Description: Basic principles and examples for adapting and applying the plasma state to solve a number of modern engineering problems. These include the plasma processing of materials for microelectronics and other uses, lighting, plasma displays, and other technologies. Prerequisite: ECE 329 or PHYS 435.

Course Topics and Hours
Principle Topics Covered Hours (Approximate)
Overview of Plasma Physics of Low-Temperature Plasmas 6
Plasma dynamics
Mean-free-paths
Sheaths
Ambipolar diffusion
Plasma-Material Interactions 6
Electron emission
Reflection
Sputtering
Melting
Plasma sources
Plasma Sources 6
DC
Inductive
ECR
Helicon
Surface-Wave
Diagnostics 6
Electric probes
Optical emission
Global electrical characteristics
Overview of Plasma Applications 18
Etching
Deposition
Ion-implantation
Magnetrons
Plasma displays
Lighting
Others
Exams 2
Total 44

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Basic Texts:Required:

  • "Handbook of Plasma Processing Technology", Edited by S.M. Rossnagel, J.J. Cuomo and W.D. Westwood (Noyes Publications, Park Ridge, NJ, 1990).
  • "Glow Discharge Processes", by Brian Chapman (John Wiley and Sons, New York, 1980).

Prerequisites: Intermediate Electricity and Magnetism at the level of ECE 329 or Phys 435.

Purpose of Course:

  • Required in the Plasma and Fusion Science and Engineering option in Nuclear Engineering.
  • The objective of this course is to form the capstone low-temperature plasma engineering experience for students in the Plasma and Fusion Science and Engineering option in Nuclear Engineering. Along with NPRE 421, "Plasma and Fusion Science' and NPRE 423, "Plasma Laboratory", NPRE 429 forms the core of this option. This class will also serve upper division students and graduate students from a number of related disciplines.
  • There is presently no course on campus on plasma engineering. ECE 523, "Gaseous Electronics', is the closest match but is is unavailable to undergraduates. The subject matter of this course was intentionally designed to minimally overlap with ECE 523 so that graduate students could benefit from taking both courses. NPRE 421 specializes in high-temperature plasma more related to fusion energy.
  • Both ECE, MSE and Physics students will benefit from this course. The Plasma Option in Nuclear Engineering has three possible paths relying on courses in those three departments. Students from other departments who are taking those other courses may develop an interest in pursuing the plasma aspects of the material. They will be well served by this course. Some informal discussions have been held with the other departments, the most noteworthy being with Professor Mark Kushner of ECE.

Instructor: David N. Ruzic

Credit: 3 Semester Hours or 3/4 Unit

Meeting hours per week: 3

Class registration opacity: 30

Semesters course offered: REFER TO MASTER LISTING

Other notes:

Course last revised: January 2007

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