Atomic properties of potential first-wall materials
Plasma processing of semiconductors
Extreme ultraviolet (EUV) sources for lithography and physical vapor deposition
For more detail including funding source information, see the plasma-material interaction group website or link directly to: http://starfire.ne.uiuc.edu
EDUCATION
Bachelor of Science, Physics/Appl Math Purdue, 1979
Master of Arts, Physics Princeton University, 1981
Doctorate of Philosophy, Physics Princeton University, 1984
ACADEMIC POSITIONS HELD
Assistant Professor, 1984-1989
Graduate Faculty in Physics, November, 1986 - present
Affiliate Faculty in Dept. of Material Science and Engineering, 1988-2002
Honors Faculty for Undergraduate Campus Honors Program, 1988 - present
Associate Professor, 1989 - 1994
Affiliate Faculty in Dept. of Electrical and Computer Engineering, 1991 - present
Professor - August, 1994 - present
Assistant Dean, August, 1995 - May, 1996
Faculty Fellow, Vice Presidents for Academic Affairs Office, August, 2000 - July 2002
Associate Vice President for Administration (40%-time), University Admin, August 2002-August 2005
MAJOR CONSULTING ACTIVITIES
Fannie and John Hertz Foundation - Interviewer and Selection Committee
TOSOH SMD Inc. - Sputtering Target Analysis
Novellus Systems - Expert Witness for Physical Vapor Deposition
Varian - Expert Witness for Physical Vapor Deposition patent disputes
OTHER INSTRUMENTAL ACTIVITIES
Instruction for JETS and MITES (now called WYSE), 1985 - present
Educational Demonstrations At Tuscola Grade School and Middle School, 8 hours/semester, 1990-present
Speaker for Junior High and High School Science Teachers, 1985 - present
Creation of a New Course - NPRE 323, Plasma Laboratory, 1998
Creation of a New Course - NPRE 329 Plasma Engineering, 2000
PUBLICATIONS
PATENTS
Chemically Enhanced PVD, disclosed 2000, patent applied for 2002, assigned to Novellus
Tin Source for Extreme Ultra Violet Lithography, TF02115, disclosed 2002
Plasma Filter for Extreme Ultra Violete Lithography, TF02117, disclosed 2002, patent applied for 2002, assigned to INTEL
Plasma Treatment of Polymers to Repel Water and Reduce Biofouling, TF02037, disclosed 2002
Thompson, K.C., E.L Antonsen, M.R. Hendricks, B.E. Jurczyk, M. Williams, D.N. Ruzic, "Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography", Microelectronics Engineering, 83 (2006) 476-484.
Nieto, M., D.N. Ruzic, W. Olczak, R. Stubbers, "Measurement of Implanted Helium Particle Transport by a Flowing Liquid Lithium Film", J. Nucl. Mater., 350 (2006) 101-112.
Ning, L., P.W. Brenner, D.N. Ruzic, "An Integrated model for the Chemically Enhanced Physical Vapor Deposition (CEPVD) of tantalum nitride-based FILMS", J. Vac. Sci. Technol., B, 24(3), (2006) 1071-1087.
Antonsen, E.L., K. C. Thompson, M. R. Hendricks, D.A. Alman, B.E. Jurczyk, D. N. Ruzic, "Ion Debris Characterization from a Z-Pinch Extreme Ultraviolet Light Source"., J. Appl. Phys., 99 063301 (2006)
M. A. Jaworski, B. E. Jurczyk, Erik L. Antonsen, D. N. Ruzic, "Direct current magnetic insulation of an immersed RF antenna", Plasma Source Science and Technology 15, 474-478 (2006)
Huatan Qiu, Keith C. Thompson, S.N. Srivastava, E.L. Antonsen, Darren A. Alman, B.E. Jurczyk, D.N. Ruzic, "Optical exposure characterization and comparisons for discharge produced plasma Sn extreme ultraviolet system", J. Microlithography, Microfabrication, and Microsystems, 5(3), 033007(1-11), 2006
Gray, T.K., M. A. Jaworski, D.N. Ruzic, "Target heat loading due to fast, transient heat pulses produced from a conical ?-pinch as a prototype for benchmarking simulations of transient heat loads", accepted in J. Nucl. Mater, 2007.
Alman, D.A., Huatan Qiu, T. Spila, Keith C. Thompson, Erik L. Antonsen, B. E. Jurczyk, D.N. Ruzic, "Characterization of Collector Optic Material Samples Exposed to a DPP EUV Light Source", accepted in J. Microlithography, Microfabrication, and Microsystems, 2007
Gray, T.K., M.A. Jaworski, D.N. Ruzic, "Target heat loading due to fast, transient heat pulses produced from a conical theta-pinch as a prototype for benchmarking simulations of transient heat loads", J. Nuc. Mater. 363-365 (2007) 1032-1036.
D. N., K.C. Thompson, B.E. Jurczyk, E.L. Antonsen, S.N. Srivastava, J.B. Spencer, "Reduction of Ion Energies from a Multicomponent Z-Pinch Plasma", IEEE Tran. On Plasma Sci. 35, 606-613 (2007) 606-613.
Srivastava, S.N., K.C. Thompson, E. L. Antonsen, H. Qiu, J.B Spencer, D. Papke, D. N. Ruzic, "Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources",J. of Applied Physics, 102, 023301, (2007)
J.P Allain, M.D. Coventry, D.N. Ruzic, "Collisional and thermal effects on liquid lithium sputtering", Phys. Rev. B, 76 (2007) 205434-1 to 12.
RECOGNITIONS AND OUTSTANDING ACHIEVEMENTS IN TEACHING
Department of Nuclear Engineering Teaching Excellence Award, 1996
College of Engineering Teaching Excellence Award, 1996
Harriet and Charles Luckman Undergraduate Distinguished Teaching Award, 1996
Broadrick-Allen Campus Honors Program Teaching Award, 1997
Graduate College Award for Outstanding Mentoring of Graduate Students Finalist, 1999
Student Award for Excellence in Undergraduate Teaching, 2003
Engineering Council Award for Excellence, 2004
SERVICE
EDITORSHIP
Member, Editorial Board, J. Vac. Sci. and Technology, 1994-2000
© 2008 The Board of Trustees at the University of Illinois