Dr. David N. Ruzic

Engineering at Illinois Engineering at Illinois

Nuclear, Plasma, and Radiological Engineering

Dr. David N. Ruzic

Dr. David N. Ruzic

RESEARCH INTERESTS

  • Experimental fusion research
  • Modeling of edge-plasma atomic physics
  • Atomic properties of potential first-wall materials
  • Plasma processing of semiconductors
  • Extreme ultraviolet (EUV) sources for lithography and physical vapor deposition
  • For more detail including funding source information, see the plasma-material interaction group website or link directly to: http://cpmi.ne.uiuc.edu

EDUCATION

  • Bachelor of Science, Physics/Appl Math, Purdue University, 1979
  • Master of Arts, Physics Princeton University, 1981
  • Doctorate of Philosophy, Physics Princeton University, 1984

ACADEMIC POSITIONS AT THE UNIVERSITY OF ILLINOIS

  • Assistant Professor, 1984-1989
  • Graduate Faculty in Physics, November, 1986 - present
  • Affiliate Faculty in Dept. of Material Science and Engineering, 1988-2002
  • Honors Faculty for Undergraduate Campus Honors Program, 1988 - present
  • Associate Professor, 1989 - 1994
  • Affiliate Faculty in Dept. of Electrical and Computer Engineering, 1991 - present
  • Professor - August, 1994 - present
  • Assistant Dean, August, 1995 - May, 1996
  • Faculty Fellow, Vice Presidents for Academic Affairs Office, August, 2000 - July 2002
  • Associate Vice President for Administration (40%-time), University Admin, August 2002-August 2005

Professional Employment

  • Research Staff I - Princeton University Plasma Physics Lab, February 1984-June 1984
  • Research Assistant - Princeton University Plasma Physica Lab, Sept. 1979-Feb. 1984
  • Teaching Assistant - Purdue University, October 1978 - August 1979
  • Professional Assistant - Purdue University, Sept. 1975 - May 1977

MAJOR CONSULTING ACTIVITIES

  • Fannie and John Hertz Foundation - Interviewer and Selection Committee
  • TOSOH SMD Inc. - Sputtering Target Analysis
  • Novellus Systems - Expert Witness for Physical Vapor Deposition
  • Varian - Expert Witness for Physical Vapor Deposition patent disputes

OTHER INSTRUMENTAL ACTIVITIES

  • Instruction for JETS and MITES (now called WYSE), 1985 - present
  • Educational Demonstrations At Tuscola Grade School and Middle School, 8 hours/semester, 1990-present
  • Speaker for Junior High and High School Science Teachers, 1985 - present
  • Creation of a New Course - NPRE 323, Plasma Laboratory, 1998
  • Creation of a New Course - NPRE 329 Plasma Engineering, 2000

HONORS AND AWARDS

  • Presidential Young Investigator Award, 1985-1990, NSF
  • Arnold O. Beckman Award, 1985
  • XEROX Award, 1990
  • Engineering Council Award for Excellence, 2004
  • Fellow, American Nuclear Society, 2004
  • Micro Professorship, 2005-2008
  • Fellow, American Vacuum Society, 2007
  • Campus Award for Excellence in Guiding Undergraduate Research, 2009

SELECT PUBLICATIONS

PATENTS
  • Chemically Enhanced PVD, disclosed 2000, patent applied for 2002, assigned to Novellus
  • Tin Source for Extreme Ultra Violet Lithography, TF02115, disclosed 2002
  • Plasma Filter for Extreme Ultra Violete Lithography, TF02117, disclosed 2002, patent applied for 2002, assigned to INTEL
  • Plasma Treatment of Polymers to Repel Water and Reduce Biofouling, TF02037, disclosed 2002
  • Erosion-Resistant Self-Healing, Self-Cleaning Collector Optics for EUV Lithography TF03076, disclosed 2003
  • "Chemically-Enhanced Physical Vapor Deposition" US #6,841,044 B1 (2005)
  • "Submicron Particle Removal", applied for Dec. 5, 2005, serial no. 11/293,903
  • "Plasma-Based Debris Mitigation for Extreme Ultraviolet (EUV) Light Source" US #7,230,258 (2007)
  • "Line-Edge Roughness Reduction Technique", TF07128, disclosed October 2007, patent applied for.
  • "Method to Produce Nanoscale Three Dimensional Porous Silicon Patterns and Applications in Self-Integrated High Aspect Ratio Vias or Trenches with Build-In Low K Porous Dielectrics and Wafer Level Packaging Integration", TF08145, disclosed July 2008, patent applied for.
  • "Plasma-Assisted Cleaning by Metastable Atom Neutralization", TF08156, disclosed August 2008, patent applied for.
ARTICLES IN JOURNALS
  • Thompson, K.C., E.L Antonsen, M.R. Hendricks, B.E. Jurczyk, M. Williams, D.N. Ruzic, "Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography", Microelectronics Engineering, 83 (2006) 476-484.
  • Nieto, M., D.N. Ruzic, W. Olczak, R. Stubbers, "Measurement of Implanted Helium Particle Transport by a Flowing Liquid Lithium Film", J. Nucl. Mater., 350 (2006) 101-112.
  • Ning, L., P.W. Brenner, D.N. Ruzic, "An Integrated model for the Chemically Enhanced Physical Vapor Deposition (CEPVD) of tantalum nitride-based FILMS", J. Vac. Sci. Technol., B, 24(3), (2006) 1071-1087.
  • Antonsen, E.L., K. C. Thompson, M. R. Hendricks, D.A. Alman, B.E. Jurczyk, D. N. Ruzic, "Ion Debris Characterization from a Z-Pinch Extreme Ultraviolet Light Source"., J. Appl. Phys., 99 063301 (2006)
  • M. A. Jaworski, B. E. Jurczyk, Erik L. Antonsen, D. N. Ruzic, "Direct current magnetic insulation of an immersed RF antenna", Plasma Source Science and Technology 15, 474-478 (2006)
  • Huatan Qiu, Keith C. Thompson, S.N. Srivastava, E.L. Antonsen, Darren A. Alman, B.E. Jurczyk, D.N. Ruzic, "Optical exposure characterization and comparisons for discharge produced plasma Sn extreme ultraviolet system", J. Microlithography, Microfabrication, and Microsystems, 5(3), 033007(1-11), 2006
  • Gray, T.K., M. A. Jaworski, D.N. Ruzic, "Target heat loading due to fast, transient heat pulses produced from a conical-pinch as a prototype for benchmarking simulations of transient heat loads", accepted in J. Nucl. Mater, 2007.
  • Alman, D.A., Huatan Qiu, T. Spila, Keith C. Thompson, Erik L. Antonsen, B. E. Jurczyk, D.N. Ruzic, "Characterization of Collector Optic Material Samples Exposed to a DPP EUV Light Source", accepted in J. Microlithography, Microfabrication, and Microsystems, 2007
  • Gray, T.K., M.A. Jaworski, D.N. Ruzic, "Target heat loading due to fast, transient heat pulses produced from a conical theta-pinch as a prototype for benchmarking simulations of transient heat loads", J. Nuc. Mater. 363-365 (2007) 1032-1036.
  • D. N. Ruzic, K.C. Thompson, B.E. Jurczyk, E.L. Antonsen, S.N. Srivastava, J.B. Spencer, "Reduction of Ion Energies from a Multicomponent Z-Pinch Plasma", IEEE Tran. On Plasma Sci. 35, 606-613 (2007) 606-613.
  • Srivastava, S.N., Thompson, K. C., Antonsen, E. L., Qiu, H., Spencer, J.B., Papke, D., and D. N. Ruzic, "Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources",J. of Applied Physics, 102, 023301, (2007)
  • Allain, J.P., Coventry, M. D., and D. N. Ruzic, "Collisional and thermal effects on liquid lithium sputtering", Phys. Rev. B, 76 (2007) 205434-1 to 12.
  • Neumann, M.J., DeFrees, R.A., Qiu, H., Ruzic, D.N., Khodykin, O., Ershov, A., and Bristol, R.L., "Plasma cleaning of lithium off of collector optics materials for use in extreme ultraviolet lithography applications". Journal of Micro-nanolithography Mems & Moems, 6:2, 23005 (Apr.-Jun. 2007) (http://dx.doi.org/10.1117/1.2750651)
  • Morris, O., Hayden, P., Dunne, P., O'Reilly, F., O'Sullivan, G., Sokell, E., Antonsen, E. L., Srivastava, S. N., Thompson, K. C., and D. N. Ruzic, "Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources" J. of Physics (2008).
  • Castano, C., Aghazarian, and D. N. Ruzic, "Preliminary evidence of field induced rhenium etching by XEF2 at high vacuum", J. Applied Physics, 103, 044901-4, (2008).
  • Shin, H., Srivastava, S. N., and D. N. Ruzic, "Tin removal from extreme ultraviolet collector optics by inductively oupled plasma reactive ion etching", J. Vac. Sci. Tech., 26(3), 389-398, (May 2008).
  • Qiu, H., Srivastava, S. N., Thompson, K. C., Neumann, M. J., and D. N. Ruzic, "Time exposure performance of Mo-Au Gibbsian segregating alloys for extreme ultraviolet collector optics," Appl. Opt. 47, 2443-2451 (2008)
  • Jaworski, M. A., Laua, C. Y., Urbansky, D. L., Malfa, M. B., Gray, T. K., Neumann, M. J., and D. N. Ruzic "Observations of liquid lithium uptake in a porous molybdenum foam," J. of Nuclear Materials. 378, pp. 105-109, (May 2008).
  • Qiu, H., Srivastava, S. N., Thompson, K. C., Neumann, M. J., and D. N. Ruzic "Temperature Dependence of Mo-Au Gibbsian Segregating Alloys," Journal of Micro/Nanolithography Mems & Moems, 7, 033004 (2008).
  • Jaworksi, M., Laua, C., Urbansky, D., Malfa, M., Gray, T., Neumann, M. J., and D. Ruzic, "Observations of Liquid Lithium Uptake in a Porous Molybdenum Foam," J. of Nuclear Materials, 378, 105-109 (2008).
  • Jarworski, M., Morley, N.B., and D. N. Ruzic, "Thermocapillary and Thermoelectric Effects in Liquid Lithium Plasma Facing Components," Journal of Nuclear Materials, Journal of Nuclear Materials 390–391, pp. 1055-1058 (2009).
  • Qiu, H., Srivastava, S. N., Thompson, K. C., Neumann, M. J., and D. N. Ruzic "The Effectiveness of Mo-Au Gibbsian Segregating (GS) Alloys and The Surface Removal Effect on the GS Performance for EUV Collector Optics," Optics Engineering, 48, 056501 (2009).
  • Sporre, J., Castano, C. H., Raju, R. Raju, and D. N. Ruzic, "Ionic Debris Measurement of Three Extreme Ultraviolet Sources," Journal of Applied Physics, 106, 4 (2009).
  • Racic, M., Ibano, K., Raju, R., and D.N. Ruzic, "Physical Erosion Studies of Plain and Lithiated Graphite," Journal of Nuclear Materials, 390-391, pp. 1043-1047 (2009).

RECOGNITIONS AND OUTSTANDING ACHIEVEMENTS IN TEACHING

  • Department of Nuclear Engineering Teaching Excellence Award, 1996
  • College of Engineering Teaching Excellence Award, 1996
  • Harriet and Charles Luckman Undergraduate Distinguished Teaching Award, 1996
  • Broadrick-Allen Campus Honors Program Teaching Award, 1997
  • Graduate College Award for Outstanding Mentoring of Graduate Students Finalist, 1999
  • Student Award for Excellence in Undergraduate Teaching, 2003
  • Engineering Council Award for Excellence, 2004

SERVICE

EDITORSHIP
  • Member, Editorial Board, J. Vac. Sci. and Technology, 1994-2000
PROFESSIONAL SOCIETY
  • American Physical Society - Member
  • American Vacuum Society - Fellow, 2007
  • Plasma Science and Technology Division
  • Chair, International PSTD, 2005 - present
  • Chair PST Division, 1991 - 1992
  • Advanced Surface Engineering Division - Executive Committee 2000-2006
  • American Nuclear Society - Fellow, 2004
  • Advisory Group Member for Plasma-Surface Interactions in Controlled Fusion, International Atomic Energy Agency - 1989-1993
  • SPIE, Technical Working Group on EUV Collector Optics, 2004-present
UNIVERSITY
  • Formed and chaired Faculty Advisory Committee to the UI-Integrate project.
  • Convinced all three campus Senates and administrations to adopt uniform grade notation, values and course numbers systems.
  • Formed and chaired Student Service Advisory Committee to the UI-Integrate project.
CAMPUS
  • Interviewer for Hertz Foundation, 1986-present
  • Selection Committee for Hertz Foundation, 1987-present
  • Campus Honors Program Mentor, 1986-present
  • Campus Honors Program Instructor, 1987-present
  • Campus Honors Program, Advisory Committee, 1989-present
  • Member of COPE (Council on Program Evaluation), 1991 - 1996
  • Task Force on the Environment: Undergraduate Education, 1993-1999
  • Illini Days speaker, 1993 - present
COLLEGE
  • Engineering Community College Liaison Committee, 1986-2000
  • College of Engineering Mentoring Program
  • Engineering Humanities and Social Science Electives Committee, 1990-1994; Chairman, 1992-1994
DEPARTMENT
  • Chairman of Student Committee, 1986-87, 1989-90, 1992-present; Member of Student Committee, 1986-90
  • Faculty Advisor for EOH, 1987-90, 1992-present
  • Special Administrative Assignments: Wrote draft of the request for "Departmental Status" for Nuclear Engineering.
  • Wrote drafts of the Nuclear Engineering Bylaws.
OTHER
  • After Dinner and Fundraiser Speaker -- various organizations